| Place of Origin: | China |
|---|---|
| Brand Name: | Newradar Gas |
| Certification: | ISO/DOT/GB |
| Model Number: | N/A |
| Minimum Order Quantity: | 1 pcs |
| Price: | negotiation |
| Packaging Details: | Packed in 10L-500L cylinder or packed according to the demands. |
| Delivery Time: | 10-20 working days after received your payment |
| Payment Terms: | L/C, , T/T, Western Union, MoneyGram |
| Supply Ability: | 1000 pcs per month |
| Product Name: | Nitrogen Trifluoride | Molecular Shape: | Trigonal Pyramidal |
|---|---|---|---|
| Flash Point: | Non-flammable | Appearance:: | Colourless Gas |
| Application: | Plasma Etching Of Silicon Wafers | EINECS No.: | 232-007-1 |
| Melting Point: | −207.15 °C | Boiling Point: | −129.06 °C |
| High Light: | electric gas,purity plus specialty gases |
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Nitrogen Trifluoride NF3 , 99.99~99.999% , Used With Tungsten Silicide , And Tungsten Produced By CVD
Description:
NF3 is a colorless gas with a moldy odor. Very toxic by inhalation. Slightly soluble in water. Corrosive to tissue. Under prolonged exposure to fire or heat the containers may rupture violently and rocket. Used to make other chemicals and as a component of rocket fuels.
Keep combustibles (wood, paper, oil, etc.) away from spilled material. Do not touch or walk through spilled material. Stop leak if you can do it without risk. If possible, turn leaking containers so that gas escapes rather than liquid. Do not direct water at spill or source of leak. Use water spray to reduce vapors or divert vapor cloud drift. Avoid allowing water runoff to contact spilled material. Prevent entry into waterways, sewers, basements or confined areas. Allow substance to evaporate. Isolate area until gas has dispersed. CAUTION: When in contact with refrigerated/cryogenic liquids, many materials become brittle and are likely to break without warning.
Specifications:
1. Physical properties
| Product Name | Nitrogen Trifluoride |
| Molecular Formula | NF3 |
| UN No. | UN 2451 |
| CAS No. | 7783-54-2 |
| EINECS No. | 232-007-1 |
2. Typical technical data
| Impurities | NF3≥99.995% Vol.% | NF3≥99.99% Vol.% | NF3≥99.98% Vol.% | NF3≥99.9% Vol.% |
| CF4 | ≤20 Vol.ppm | ≤40 Vol.ppm | ≤100 Vol.ppm | ≤500 Vol.ppm |
| N2 | ≤5 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤50 Vol.ppm |
| O2+Ar | ≤3 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤50 Vol.ppm |
| CO2 | ≤1 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
| H2O | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm |
| HF | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm |
| SF6 | ≤1 Vol.ppm | ≤2 Vol.ppm | ≤2 Vol.ppm | ≤25 Vol.ppm |
| N2O | ≤1 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
| CO | ≤0.5 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
3. Package
DOT 3AA / GB5099 seamless steel cylinders/ ton cylinder
| Cylinders Information | Individual Cylinder(47L) | Bundle | Y Cylinder | ISO Tube |
| Material | Mn Steel(316L) | Cr-Mo Steel | ||
| Valve Connection Type | CGA 330 CGS/DISS 640 | DISS 640 etc | ||
| Type | DOT-3AA GB5099 | 47L*16/47L*25 | 20ft:40ft | |
| Pressure | 9-13Mpa | |||
| Filling Weight | 20/22.7kg | 195/200 |
Applications:
Nitrogen Trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photo-electricity industry etc. it’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.
